Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.

CiNii Available at 5 libraries

Bibliographic Information

Title
"Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A."
Statement of Responsibility
editors, Erin C. Jones ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c2001
Book size
24 cm

Search this Book/Journal

Notes

Includes bibliographical references and indexes

Related Books

See more

Details 詳細情報について

  • CRID
    1130000798232329216
  • NII Book ID
    BA56818510
  • ISBN
    1558996052
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, PA
  • Data Source
    • CiNii Books
Back to top