Optical and dimensional-measurement problems with photomasking in microelectronics

HathiTrust 1975 Web Site CiNii Available at 2 libraries

Bibliographic Information

Title
"Optical and dimensional-measurement problems with photomasking in microelectronics"
Statement of Responsibility
John M. Jerke
Publisher
  • U.S. G.P.O.
Publication Year
  • 1975
Book size
26 cm
Volume(Year)
  • 400-20

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Notes

Bibliography: p. 31-36

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