Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.

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Bibliographic Information

Title
"Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A."
Statement of Responsibility
editors, S.P. Murarka ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c1994
Book size
24 cm

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Notes

Includes bibliographical references and indexes

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