Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California

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Bibliographic Information

Title
"Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California"
Statement of Responsibility
Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Publisher
  • SPIE
Publication Year
  • c1995
Book size
28 cm
Series Name / No
  • pbk.
Other Title
  • Integrated circuit metrology, inspection, and process control 9

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Notes

Includes bibliographical references and author index

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