Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California
Bibliographic Information
- Title
- "Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California"
- Statement of Responsibility
- Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
- Publisher
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- SPIE
- Publication Year
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- c1995
- Book size
- 28 cm
- Series Name / No
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- pbk.
- Other Title
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- Integrated circuit metrology, inspection, and process control 9
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Notes
Includes bibliographical references and author index
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Details 詳細情報について
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- CRID
- 1130006265899292037
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- NII Book ID
- BC06573289
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- ISBN
- 0819417874
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- LCCN
- 94069902
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- Web Site
- https://lccn.loc.gov/94069902
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7874
- DC20: 621.3815/31
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- Data Source
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- CiNii Books