Micromachined devices and components : 23-24 October, 1995, Austin, Texas

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Bibliographic Information

Title
"Micromachined devices and components : 23-24 October, 1995, Austin, Texas"
Statement of Responsibility
Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1995
Book size
28 cm

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Notes

Includes bibliographic references and index

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