Micromachined devices and components : 23-24 October, 1995, Austin, Texas
Bibliographic Information
- Title
- "Micromachined devices and components : 23-24 October, 1995, Austin, Texas"
- Statement of Responsibility
- Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering
- Publisher
-
- SPIE
- Publication Year
-
- c1995
- Book size
- 28 cm
Search this Book/Journal
Notes
Includes bibliographic references and index
- Tweet
Details 詳細情報について
-
- CRID
- 1130006265935322531
-
- NII Book ID
- BC06604972
-
- ISBN
- 0819420085
-
- LCCN
- 95070377
-
- Web Site
- https://lccn.loc.gov/95070377
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Bellingham, Wash.
-
- Classification
-
- LCC: TJ163
- DC21: 621.3815/2
-
- Subject
-
- Data Source
-
- CiNii Books