In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas
Bibliographic Information
- Title
- "In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas"
- Statement of Responsibility
- Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society
- Publisher
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- SPIE
- Publication Year
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- c1997
- Book size
- 28 cm
- Other Title
-
- In line characterization techniques for performance and yield enhancement in microelectronic manufacturing
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Notes
Includes bibliographical references and author index
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Details 詳細情報について
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- CRID
- 1130006495885316363
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- NII Book ID
- BC06945645
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- ISBN
- 0819426474
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- LCCN
- 98125245
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- Web Site
- https://lccn.loc.gov/98125245
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Data Source
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- CiNii Books