In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas

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Bibliographic Information

Title
"In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas"
Statement of Responsibility
Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society
Publisher
  • SPIE
Publication Year
  • c1997
Book size
28 cm
Other Title
  • In line characterization techniques for performance and yield enhancement in microelectronic manufacturing

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Notes

Includes bibliographical references and author index

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