In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas

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書誌事項

タイトル
"In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas"
責任表示
Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society
出版者
  • SPIE
出版年月
  • c1997
書籍サイズ
28 cm
タイトル別名
  • In line characterization techniques for performance and yield enhancement in microelectronic manufacturing

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Includes bibliographical references and author index

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