Microelectronic manufacturing yield, reliability, and failure analysis IV : 23-24 September, 1998, Santa Clara, California

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書誌事項

タイトル
"Microelectronic manufacturing yield, reliability, and failure analysis IV : 23-24 September, 1998, Santa Clara, California"
責任表示
Sharad Prasad, Hans-Dieter Hartmann, Tohru Tsujide, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.]
出版者
  • SPIE
出版年月
  • c1998
書籍サイズ
28 cm
タイトル別名
  • Microelectronic manufacturing yield, reliability, and failure analysis 4

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Includes bibliographical references and author index

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