Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany
Bibliographic Information
- Title
- "Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany"
- Statement of Responsibility
- Christophe Gorecki, chair/editor ; sponsored by EOS--European Optical Society ... [et al.]
- Publisher
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- SPIE
- Publication Year
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- c1999
- Book size
- 28 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130006728161289871
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- NII Book ID
- BC07402667
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- ISBN
- 081943311X
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- LCCN
- 00708945
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- Web Site
- https://lccn.loc.gov/00708945
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Data Source
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- CiNii Books