Micromachined devices and components V : 20-21 September 1999, Santa Clara, California
Bibliographic Information
- Title
- "Micromachined devices and components V : 20-21 September 1999, Santa Clara, California"
- Statement of Responsibility
- Patrick J. French, Eric Peeters, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]
- Publisher
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- SPIE
- Publication Year
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- c1999
- Book size
- 28 cm
- Other Title
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- Micromachined devices and components 5
- Micromachined devices and components five
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130006728301505937
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- NII Book ID
- BC07420884
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- ISBN
- 0819434736
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- LCCN
- 00267603
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- Web Site
- https://lccn.loc.gov/00267603
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Subject
-
- Data Source
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- CiNii Books