Micromachined devices and components V : 20-21 September 1999, Santa Clara, California

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Bibliographic Information

Title
"Micromachined devices and components V : 20-21 September 1999, Santa Clara, California"
Statement of Responsibility
Patrick J. French, Eric Peeters, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]
Publisher
  • SPIE
Publication Year
  • c1999
Book size
28 cm
Other Title
  • Micromachined devices and components 5
  • Micromachined devices and components five

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Notes

Includes bibliographical references and index

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