MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA
Bibliographic Information
- Title
- "MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA"
- Statement of Responsibility
- Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
- Publisher
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- SPIE
- Publication Year
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- c2000
- Book size
- 28 cm
- Other Title
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- Microelectromechanical systems reliability for critical applications
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130006728475012626
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- NII Book ID
- BC07472899
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- ISBN
- 0819438367
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- LCCN
- 2001274449
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- Web Site
- https://lccn.loc.gov/2001274449
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7875
- DC21: 621.31/042
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- Data Source
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- CiNii Books