Advanced gate stack, source/drain, and channel engineering for si-based CMOS 6 : new materials, processes, and equipment

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Bibliographic Information

Title
"Advanced gate stack, source/drain, and channel engineering for si-based CMOS 6 : new materials, processes, and equipment"
Statement of Responsibility
editors, E.P. Gusev ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c2010
Book size
23 cm
Series Name / No
  • : hardcover

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Details 詳細情報について

  • CRID
    1130009670188468623
  • NII Book ID
    BC12706988
  • ISBN
    9781566777919
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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