MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China
Bibliographic Information
- Title
- "MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China"
- Statement of Responsibility
- Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors ; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.] ; supported by, National Natural Science Foundation of China ... [et al.] ; published by, SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c2002
- Book size
- 28 cm
- Other Title
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- MOEMS technologies and applications
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Notes
Includes bibliographic references and author index
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Details 詳細情報について
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- CRID
- 1130011528893911431
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- NII Book ID
- BC16158851
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- ISBN
- 081944717X
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- LCCN
- 2003265092
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- Web Site
- https://lccn.loc.gov/2003265092
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Washington
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- Subject
-
- Data Source
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- CiNii Books