64- to 256-megabit reticle generation : technology requirements and approaches : proceedings of a conference held 24 September 1993, Santa Clara, California

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書誌事項

タイトル
"64- to 256-megabit reticle generation : technology requirements and approaches : proceedings of a conference held 24 September 1993, Santa Clara, California"
責任表示
Gregory K. Hearn, editor ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
出版者
  • SPIE Optical Engineering Press
出版年月
  • c1994
書籍サイズ
27 cm
シリーズ名/番号
  • hardcover
タイトル別名
  • Sixty-four to two hundred fifty-six-megabit reticle generation
  • Technology requirements and approaches
  • Proceedings of the Conference on the 64- to 256-megabit Reticle Generation, 24 September 1993, Santa Clara, California

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Includes bibliographical references and index

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