Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

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Bibliographic Information

Title
"Integrated circuit metrology, inspection, and process control , 4-6 March 1987, Santa Clara, California /Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering"
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c1987
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographical references and index

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