Optical microlithography II : technology for the 1980s : March 16-17, 1983, Santa Clara, California

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Bibliographic Information

Title
"Optical microlithography II : technology for the 1980s : March 16-17, 1983, Santa Clara, California"
Statement of Responsibility
Harry L. Stover, chairman/editor ; sponsored by SPIE--the International Society for Optical Engineering, in cooperation with National Bureau of Standards, International Society for Hybrid Microelectronics, Northern California Microphotomask/Masking Working Group
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c1983
Book size
28 cm
Series Name / No
  • pbk.
Other Title
  • Optical microlithography 2
  • Optical microlithography two

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Notes

Includes bibliographical references and index

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