Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California
CiNii
Available at 1 libraries
Bibliographic Information
- Title
- "Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California"
- Statement of Responsibility
- chair/editor Robert D. Allen ; sponsored and published by SPIE--the International Society for Optical Engineer
- Publisher
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- SPIE
- Publication Year
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- c1995
- Book size
- 28 cm
- Series Name / No
-
- SET
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Notes
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130282268815302016
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- NII Book ID
- BA29309547
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- ISBN
- 0819417866
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Data Source
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- CiNii Books