Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California

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Bibliographic Information

Title
"Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California"
Statement of Responsibility
chair/editor Robert D. Allen ; sponsored and published by SPIE--the International Society for Optical Engineer
Publisher
  • SPIE
Publication Year
  • c1995
Book size
28 cm
Series Name / No
  • SET

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130282268815302016
  • NII Book ID
    BA29309547
  • ISBN
    0819417866
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
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