In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland

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書誌事項

タイトル
"In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland"
責任表示
Kostas Amberiadis ... [et al.], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise, Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers
出版者
  • SPIE
出版年月
  • c1999
書籍サイズ
28 cm

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Includes bibliographic references and author index

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