Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Bibliographic Information
- Title
- "Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France"
- Statement of Responsibility
- Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]
- Publisher
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- SPIE
- Publication Year
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- c2002
- Book size
- 28 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282269046448128
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- NII Book ID
- BA86010806
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- ISBN
- 0819445185
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- LCCN
- 2002510518
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- Web Site
- https://lccn.loc.gov/2002510518
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Classification
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- LCC: TK7875
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- Data Source
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- CiNii Books