Submicron lithography

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Bibliographic Information

Title
"Submicron lithography"
Statement of Responsibility
Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California
Publisher
  • International Society for Optical Engineering
Publication Year
  • 1982
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographical references and indexes

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