Introduction to microlithography : theory, materials, and processing
Bibliographic Information
- Title
- "Introduction to microlithography : theory, materials, and processing"
- Statement of Responsibility
- L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
- Publisher
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- The American Chemical Society
- Publication Year
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- 1983
- Book size
- 24 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282269155489664
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- NII Book ID
- BA04572087
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- ISBN
- 0841207755
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- LCCN
- 83005968
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- Web Site
- https://lccn.loc.gov/83005968
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Washington, D.C.
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- Subject
-
- Data Source
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- CiNii Books