Monitoring and control of plasma-enhanced processing of semiconductors : proceedings : 1-2 November 1988, Santa Clara, California
Bibliographic Information
- Title
- "Monitoring and control of plasma-enhanced processing of semiconductors : proceedings : 1-2 November 1988, Santa Clara, California"
- Statement of Responsibility
- James E. Griffiths, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1989
- Book size
- 28 cm
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Notes
Includes bibliographical references
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Details 詳細情報について
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- CRID
- 1130282269185684864
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- NII Book ID
- BA10622747
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- ISBN
- 0819400726
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- LCCN
- 88063652
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- Web Site
- https://lccn.loc.gov/88063652
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7871.85
- DC20: 621.381/52
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- Subject
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- LCSH: Semiconductors -- Congresses
- LCSH: Plasma engineering -- Congresses
- LCSH: Epitaxy -- Congresses
- LCSH: Vapor plating -- Congresses
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- Data Source
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- CiNii Books