Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin
Bibliographic Information
- Title
- "Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin"
- Statement of Responsibility
- edited by Bernd O. Kolbesen, Daniel V. Mc Caughan, Wilfried Vandervorst ; [sponsored by the] Electronics Division
- Publisher
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- Electrochemical Society
- Publication Year
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- c1990
- Book size
- 23 cm
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Notes
"Papers presented at the Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation, in Berlin, September 15, 1989"--P. iii
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282269197160192
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- NII Book ID
- BA11943418
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- LCCN
- 90081719
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- Web Site
- https://lccn.loc.gov/90081719
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ (10 S. Main St., Pennington 08534-2896)
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- Classification
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- LCC: QD139.S44
- DC20: 621.381/52
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- Subject
-
- Data Source
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- CiNii Books
