Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

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Bibliographic Information

Title
"Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia"
Statement of Responsibility
Jung-Chih Chiao, Lorenzo Fraone, H. Barry Harrison, Andrei M. Shkel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section
Publisher
  • SPIE--the International Society of Optical Engineering
Publication Year
  • c2001
Book size
28 cm

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Notes

Includes index

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Details 詳細情報について

  • CRID
    1130282269221562496
  • NII Book ID
    BA58802522
  • ISBN
    0819443220
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash.
  • Data Source
    • CiNii Books
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