Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan

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タイトル: "Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan"

責任表示: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. ; editors: Virendra V.S. Rana, Rajiv V. Joshi, Iwao Ohdomari ; associate editors, Robert S. Blewer ... [et al.]

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Contains papers presented at the Advanced Metallization for ULSI Applications Conference

Includes bibliography and index