Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies
Bibliographic Information
- Title
- "Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies"
- Statement of Responsibility
- edited by M. Gentili, C. Giovannella, and S. Selci
- Publisher
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- Kluwer Academic Publishers
- Publication Year
-
- 1994
- Book size
- 25 cm
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Notes
"Proceedings of the NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-Ray Lithographies, Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso
"Published in cooperation with NATO Scientific Affairs Division."
Includes index
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Details 詳細情報について
-
- CRID
- 1130282269314344448
-
- NII Book ID
- BA22470329
-
- ISBN
- 0792327942
-
- LCCN
- 94010205
-
- Web Site
- https://lccn.loc.gov/94010205
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- Text Lang
- en
-
- Country Code
- ne
-
- Title Language Code
- en
-
- Place of Publication
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- Dordrecht ; Boston
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- Classification
-
- LCC: TK7874.8
- DC20: 621.3815/31
-
- Data Source
-
- CiNii Books
