Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies

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書誌事項

タイトル
"Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies"
責任表示
edited by M. Gentili, C. Giovannella, and S. Selci
出版者
  • Kluwer Academic Publishers
出版年月
  • 1994
書籍サイズ
25 cm

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注記

"Proceedings of the NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-Ray Lithographies, Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso

"Published in cooperation with NATO Scientific Affairs Division."

Includes index

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