NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS June 26- July 1, 2011, Suntec, Singapore
CiNii
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Bibliographic Information
- Title
- "NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS June 26- July 1, 2011, Suntec, Singapore"
- Statement of Responsibility
- edited by Lynn Khine and Julius M. Tsai
- Publisher
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- Trans Tech Publications
- Publication Year
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- c2011
- Book size
- 25 cm
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130282269326519680
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- NII Book ID
- BB06517881
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- ISBN
- 9783037851456
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- Text Lang
- en
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- Country Code
- sz
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- Title Language Code
- en
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- Place of Publication
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- Durnten-Zurich
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- Data Source
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- CiNii Books