Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

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タイトル: "Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium"

責任表示: editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics

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"... held April 28-May 2, 2003 in Paris as a part of the 203rd Meeting of the Electrochemical Society (ECS)"--on pref

Includes bibliographical references and indexes