Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

Name: Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California
Author: Narayan, J. (Jaydish), Society of Photo-optical Instrumentation Engineers

Narayan, J. (Jaydish), Society of Photo-optical Instrumentation Engineers

Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

Web Site CiNii 所蔵館 3館

書誌事項

タイトル: "Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California"

責任表示: J. Narayan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMATECH [and] Center for Advanced Electronic Materials Processing, North Carolina State University [and] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison

出版者

SPIE

出版年月

c1990

書籍サイズ: 28 cm

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Includes bibliographical references and index

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Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

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Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

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