Bibliographic Information
- Title
- "Semiconductor fabrication : technology and metrology"
- Statement of Responsibility
- Dinesh C. Gupta, editor
- Publisher
-
- ASTM
- Publication Year
-
- c1989
- Book size
- 24 cm
Search this Book/Journal
Notes
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials International
Includes bibliographies and indexes
"ASTM publication code number (PCN) 04-990000-46"--T.p. verso
- Tweet
Details 詳細情報について
-
- CRID
- 1130282269469139840
-
- NII Book ID
- BA07637305
-
- ISBN
- 0803112734
-
- LCCN
- 89033789
-
- Web Site
- https://lccn.loc.gov/89033789
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Philadelphia, PA
-
- Classification
-
- LCC: TK7871.85
- DC20: 621.381/52
-
- Subject
-
- Data Source
-
- CiNii Books