Bibliographic Information
- Title
- "Semiconductor fabrication : technology and metrology"
- Statement of Responsibility
- Dinesh C. Gupta, editor
- Publisher
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- ASTM
- Publication Year
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- c1989
- Book size
- 24 cm
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Notes
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials International
Includes bibliographies and indexes
"ASTM publication code number (PCN) 04-990000-46"--T.p. verso
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Details 詳細情報について
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- CRID
- 1130282269469139840
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- NII Book ID
- BA07637305
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- ISBN
- 0803112734
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- LCCN
- 89033789
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- Web Site
- https://lccn.loc.gov/89033789
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Philadelphia, PA
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- Classification
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- LCC: TK7871.85
- DC20: 621.381/52
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- Subject
-
- Data Source
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- CiNii Books
