Cleaning and surface conditioning technology in semiconductor device manufacturing 10

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Bibliographic Information

Title
"Cleaning and surface conditioning technology in semiconductor device manufacturing 10"
Statement of Responsibility
editors, T. Hattori, R. E. Novak, J. Ruzyllo ; associate editors, P. Besson, P. Mertens ; sponsoring divisions, Electronics and Photonics
Publisher
  • Electrochemical Society
Publication Year
  • c2007
Book size
24 cm.
Series Name / No
  • : CD-ROM
Other Title
  • Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing
  • Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10

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Notes

"The Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Washington, DC in October 2007." -- on pref

Includes bibliographical references and indexes

Title from CD-ROM: Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10

"... have the pleasure of presenting to you, in one CD-ROM, the collection of papers included in all ten Cleaning Symposium proceedings."--on pref. of CD-ROM

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Details 詳細情報について

  • CRID
    1130282269508359552
  • NII Book ID
    BA84580235
  • ISBN
    9781566775687
    9781566775809
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
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