Cleaning and surface conditioning technology in semiconductor device manufacturing 10
CiNii
Available at 1 libraries
Bibliographic Information
- Title
- "Cleaning and surface conditioning technology in semiconductor device manufacturing 10"
- Statement of Responsibility
- editors, T. Hattori, R. E. Novak, J. Ruzyllo ; associate editors, P. Besson, P. Mertens ; sponsoring divisions, Electronics and Photonics
- Publisher
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- Electrochemical Society
- Publication Year
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- c2007
- Book size
- 24 cm.
- Series Name / No
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- : CD-ROM
- Other Title
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- Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing
- Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10
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Notes
"The Tenth International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the Fall Meeting of the Electrochemical Society in Washington, DC in October 2007." -- on pref
Includes bibliographical references and indexes
Title from CD-ROM: Cleaning Technology in Semiconductor Device Manufacturing 1989–2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1–10
"... have the pleasure of presenting to you, in one CD-ROM, the collection of papers included in all ten Cleaning Symposium proceedings."--on pref. of CD-ROM
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Details 詳細情報について
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- CRID
- 1130282269508359552
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- NII Book ID
- BA84580235
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- ISBN
- 9781566775687
- 9781566775809
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books