Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

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Bibliographic Information

Title
"Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland"
Statement of Responsibility
Kevin Yallup, Murali K. Narasimhan, chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise, Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers
Publisher
  • SPIE
Publication Year
  • c1999
Book size
28 cm

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Notes

Includes bibliographic references and author index

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