Bibliographic Information
- Title
- "Mechanical microsensors"
- Statement of Responsibility
- M. Elwenspoek, R. Wiegerink
- Publisher
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- Springer-Verlag
- Publication Year
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- c2001
- Book size
- 25 cm
- Series Name / No
-
- : gw
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Notes
"Physics and Astronomy online library"--Half t.p
Includes bibliographical references (p. [274]-290) and index
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Details 詳細情報について
-
- CRID
- 1130282269621806848
-
- NII Book ID
- BA51428020
-
- ISBN
- 3540675825
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- LCCN
- 00057363
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- Web Site
- https://lccn.loc.gov/00057363
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- Text Lang
- en
-
- Country Code
- gw
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- Title Language Code
- en
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- Place of Publication
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- Berlin
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- Classification
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- LCC: TK7875.E49
- DC21: 681/.2
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- Subject
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- LCSH: Detectors -- Design and construction
- LCSH: Microelectromechanical systems -- Design and construction
- LCSH: Transducers
- LCSH: Silicon
- LCSH: Micromachining
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- Data Source
-
- CiNii Books