Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June, 1998
Bibliographic Information
- Title
- "Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation into Semiconductors, Oxides and Ceramics, Strasbourg, France, 16-19 June, 1998"
- Statement of Responsibility
- edited by J.K.N. Lindner ... [et al.]
- Publisher
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- Elsevier
- Publication Year
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- c1999
- Book size
- 29 cm
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Notes
"Reprinted from: Nuclear instruments and methods B, vol. 147/1-4"--T.p. verso
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282269627371776
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- NII Book ID
- BA5039164X
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- ISBN
- 0080436137
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- LCCN
- 99209818
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- Web Site
- https://lccn.loc.gov/99209818
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- Text Lang
- en
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- Country Code
- ne
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- Title Language Code
- en
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- Place of Publication
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- Amsterdam ; New York ; Tokyo
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- Classification
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- LCC: TK7871.85
- DC21: 621.3815/2
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- Data Source
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- CiNii Books