ULSI process integration 7

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Bibliographic Information

Title
"ULSI process integration 7"
Statement of Responsibility
editors, C. Claeys ... [et al.] ; sponsoring divisions, Electronics and Photonics
Publisher
  • Electrochemical Society
Publication Year
  • c2011
Book size
23 cm
Series Name / No
  • : hardcover
Other Title
  • Dielectric and semiconductor materials, devices, and processing

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Notes

Includes bibliographical references and index

"The issue of ECS Transactions includes papers that were presented at the Seventh Symposium on ULSI Process Integration held in Boston, MA at the 220th Meeting of the Electrochemical Society, October 9-14, 2011." -- preface

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Details 詳細情報について

  • CRID
    1130282269627964928
  • NII Book ID
    BB07417317
  • ISBN
    9781566779074
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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