11th Annual Symposium on Photomask Technology : September 25-27, 1991, Sunnyvale, California
Bibliographic Information
- Title
- "11th Annual Symposium on Photomask Technology : September 25-27, 1991, Sunnyvale, California"
- Statement of Responsibility
- sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
- Publisher
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- SPIE
- Publication Year
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- c1992
- Book size
- 28 cm
- Other Title
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- Eleventh Annual Symposium on Photomask Technology
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282269670493952
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- NII Book ID
- BA26322083
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- ISBN
- 081940733X
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- LCCN
- 91068116
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- Web Site
- https://lccn.loc.gov/91068116
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Subject
-
- Data Source
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- CiNii Books