Polymers for microelectronics : resists and dielectrics

Thompson, L. F., Willson, C. G. (C. Grant), 田川, 精一, American Chemical Society. Division of Polymeric Materials : Science and Engineering, American Chemical Society. Meeting

Polymers for microelectronics : resists and dielectrics

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書誌事項

タイトル: "Polymers for microelectronics : resists and dielectrics"

責任表示: Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor

出版者

American Chemical Society

出版年月

1994

書籍サイズ: 24 cm

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注記

"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."

Includes bibliographical references and indexes

Polymers for microelectronics : resists and dielectrics

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Polymers for microelectronics : resists and dielectrics

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報 詳細情報について

書き出し

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