Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA

CiNii Available at 2 libraries

Bibliographic Information

Title
"Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA"
Statement of Responsibility
Jean Michel Karam, John Yasaitis, chair/editor ; sponsored and published by SPIE--The International Society of Optical Engineering ; cooperationg organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]
Publisher
  • SPIE
Publication Year
  • c2001
Book size
28 cm

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

Back to top