Lasers in microlithography : 2-3 March 1987, Santa Clara, California

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Bibliographic Information

Title
"Lasers in microlithography : 2-3 March 1987, Santa Clara, California"
Statement of Responsibility
Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
  • The Society
Publication Year
  • c1987
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Errata slip inserted

Label on cover: Daniel J. Ehrlich, Jeffrey Y. Tsao, John Samuel Batchelder, chairs/editors

Includes bibliographical references and index

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