Lasers in microlithography : 2-3 March 1987, Santa Clara, California
Bibliographic Information
- Title
- "Lasers in microlithography : 2-3 March 1987, Santa Clara, California"
- Statement of Responsibility
- Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
- Publisher
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- The Society
- Publication Year
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- c1987
- Book size
- 28 cm
- Series Name / No
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- pbk.
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Notes
Errata slip inserted
Label on cover: Daniel J. Ehrlich, Jeffrey Y. Tsao, John Samuel Batchelder, chairs/editors
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130282269862022400
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- NII Book ID
- BA14030761
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- ISBN
- 0892528095
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- LCCN
- 87060742
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- Web Site
- https://lccn.loc.gov/87060742
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TA1673
- DC20: 621.381/531
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- Subject
-
- Data Source
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- CiNii Books