Proceedings of the fourth Symposium on Plasma Processing

Name: Proceedings of the fourth Symposium on Plasma Processing
Author: Symposium on Plasma Processing, Electrochemical Society. Meeting, Mathad, G. S., Schwartz, G. C., Smolinsky, G., Electrochemical Society. Dielectrics and Insulation Division, Electrochemical Society. Electronics Division

Symposium on Plasma Processing, Electrochemical Society. Meeting, Mathad, G. S., Schwartz, G. C., Smolinsky, G., Electrochemical Society. Dielectrics and Insulation Division, Electrochemical Society. Electronics Division

Proceedings of the fourth Symposium on Plasma Processing

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書誌事項

タイトル: "Proceedings of the fourth Symposium on Plasma Processing"

責任表示: edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky ; [sponsored by] Dielectrics and Insulation and Electronics Divisions

出版者

Electrochemical Society

出版年月

c1983

書籍サイズ: 23 cm

タイトル別名

Plasma processing

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注記

Includes bibliographical references and indexes

"... was held during the Spring meeting of the Electrochemical Society, May 8-13, 1983 in San Francisco, Calif." -- on pref

Proceedings of the fourth Symposium on Plasma Processing

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Proceedings of the fourth Symposium on Plasma Processing

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

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書き出し

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