Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A.
CiNii
Available at 2 libraries
Bibliographic Information
- Title
- "Tungsten and other advanced metals for VLSI/ULSI application V : proceedings of the 1989 workshop held September 20-21, 1989, San Mateo, California, U.S.A."
- Statement of Responsibility
- editors, S. Simon Wong, Seijiro Furukawa ; associate editors, Roc Blumenthal ... [et al.] ; sponsored by Continuing Education in Engineering, University Extension, University of Calfornia, Berkeley, and October 19-20, 1989, Tokyo, Japan, sponsored by the Japan Society of Applied Physics
- Publisher
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- Materials Research Society
- Publication Year
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- c1990
- Book size
- 24 cm
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Notes
Includes bibliography and index
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Details 詳細情報について
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- CRID
- 1130282270087650176
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- NII Book ID
- BA10979941
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- ISBN
- 1558990682
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pittsburgh, Pa
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- Data Source
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- CiNii Books