Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices

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書誌事項

タイトル
"Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices"
責任表示
editors, Bernd O. Kolbesen ... [et al.]. ; sponsored by the Electrochemical Society, Inc., Electronics Division
出版者
  • Electrochemical Society
出版年月
  • c1999
書籍サイズ
24 cm
シリーズ名/番号
  • :ECS
  • :SPIE

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注記

ALTECH 99 was held Sept. 16-17, 1999, jointly with ESSDERC 99, the 29th European Solid State Device Research Conference, and the ECS Symposium on Diagnostic Techniques for Semiconductor Materials and Devices was held as part of the 1999 Joint International Meeting, 196th Meeting of the Electrochemical Society and the 1999 Fall Meeting of the Electrochemical Society of Japan, Honolulu, Hawaii, Oct. 17-22

"Published in cooperation with the International Society for Optical Engineering."

Includes bibliographical references and indexes

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