Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA

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Bibliographic Information

Title
"Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA"
Statement of Responsibility
Lars W. Liebmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH
Publisher
  • SPIE
Publication Year
  • c2005
Book size
28 cm

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Notes

Includes bibliographical references and author index

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