Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)

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Bibliographic Information

Title
"Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)"
Statement of Responsibility
edited by Gary E. McGuire
Publisher
  • Noyes Publications
Publication Year
  • c1988
Book size
25 cm

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Notes

Includes bibliographies and index

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