Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II

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書誌事項

タイトル
"Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II"
責任表示
editors, Bernd O. Kolbesen ... [et al.] ; Electronics Division [of the Electrochemical Society]
出版者
  • Electrochemical Society
出版年月
  • c1997
書籍サイズ
23 cm
タイトル別名
  • Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II

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注記

"This ... volume contains the 13 invited papers, 21 of 22 contributed papers and 10 papers presented as poster at the Second Symposium on 'Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing' which was part 01B of the Symposium on Silicon Cleaning Technology' held at the '1997 Joint International Meeting--The 192nd Meeting of the Electrochemical Society and the 48th Annual Meeting of the International Society of Electrochemistry' from August 31 to September 5, 1997 in Paris/France."--Preface

Includes bibliographic references and indexes

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