Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices

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Bibliographic Information

Title
"Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices"
Statement of Responsibility
edited by Evgeni Gusev
Publisher
  • Springer
Publication Year
  • c2006
Book size
25 cm
Series Name / No
  • : pbk
Other Title
  • Defects in high-k gate dielectric stacks

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Notes

"Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices, St. Petersburg, Russia, July 11-14 2005"--T.p. verso

Includes bibliographical references and indexes

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