X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York
Bibliographic Information
- Title
- "X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York"
- Statement of Responsibility
- Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering
- Publisher
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- S.P.I.E.-- International Society for Optical Engineering
- Publication Year
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- 1984
- Book size
- 28 cm
- Series Name / No
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- pbk.
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Notes
Includes bibliographies and index
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Details 詳細情報について
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- CRID
- 1130282270353202304
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- NII Book ID
- BA23963864
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- ISBN
- 0892524839
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- LCCN
- 83051563
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- Web Site
- https://lccn.loc.gov/83051563
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7836
- DC19: 621.3815/2
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- Subject
-
- Data Source
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- CiNii Books