Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.
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Bibliographic Information
- Title
- "Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A."
- Statement of Responsibility
- editors, David A. LaVan ... [et al.]
- Publisher
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- Materials Research Society
- Publication Year
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- c2008
- Book size
- 24 cm
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Notes
Includes index
Other editors: Mark G. da Silva, S. Mark Spearing, Srikar Vengallatore
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Details 詳細情報について
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- CRID
- 1130282270377624448
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- NII Book ID
- BA86491577
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- ISBN
- 9781558999909
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Warrendale
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- Data Source
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- CiNii Books