Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology

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Bibliographic Information

Title
"Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology"
Statement of Responsibility
edited by G.R. Srinivasan, J. Plummer, D. Antoniadis ; [sponsored by] Electronics and Dielectrics and Insulation Divisions
Publisher
  • Electrochemical Society
Publication Year
  • c1988
Book size
23 cm
Other Title
  • Process physics and modeling in semiconductor technology

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Notes

Includes bibliographical references and indexes

"... held in San Diego, California, October 19-24, 1986, and at the General Session of the ECS 170th meeting" -- on pref

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